SIGA GmbH

SIGA GmbH, founded in 1992 and located in Allershausen, Germany, develops and builds custom systems for dosing gases and liquid precursors, including control hardware and software. Its product lines comprise precursor evaporators for one or multiple precursors, liquid dosing with subsequent evaporation, precursor supply systems, gas mixing systems, ultra-pure gas systems, activated carbon filter loading stations and burner systems. Components used include mass flow controllers, valves, filters, pressure sensors and temperature sensors. The systems serve manufacturing processes where gases are employed, such as thin-film deposition by CVD. The company holds DIN EN ISO 9001:2015 certification.